CVD Pressure Transducers
Gems Sensors provides the most stable pressure sensor on the market today by combining advanced sensing technology with highly automated and revolutionary manufacturing methods. The result is a sensing element comprised of silicon, stainless steel, glass, and other metals joined on a molecular level to form a pressure transducer that is impervious to aging.
If your application requires long life components, Gems Sensors CVD transducers are designed with you in mind. Psibar® CVD pressure transducers bring exceptional performance to a wide variety of applications across multiple industries. The strength of Psibar® pressure sensors starts with the science of CVD. Gems Sensors Psibar® transducers are manufactured using plasma-enhanced Chemical Vapor Deposition (CVD) technology. This sophisticated technique uses a chemical vapor to deposit thin layers of silicon and silicon dioxide on a stainless steel substratum to form a very sensitive and accurate polysilicon strain gauge. Since the elements of the strain gauge are fused together at the atomic level, the strength and integrity of the bond far exceeds the adhesives used in common pressure sensors.
Our CVD transducers are inherently more stable and less sensitive to thermal exposure and pressure cycling than silicon-based pressure transducers. Your reward is a lower total cost of ownership. All sensor conditioning, including amplification, temperature calibration and filtering is performed by our unique ASIC. It allows configurable output and pressures ranges, sets the zero and span tolerance and ensures interchangeability from unit to unit. The use of an ASIC eliminates laser trimming for temperature compensation, and unnecessary external components. Besides reducing size and complexity, the best reduction our ASIC accomplishes is in the price of a Psibar® transducer.
The CVD sensor and ASIC circuitry is complemented by all stainless steel construction delivering excellent media compatibility; all major components are joined by welding. This construction technique produces a highly stable pressure transducer that withstands harsh media, and is configurable to satisfy specific application requirements. Psibar® pressure transducers are produced in an automated, zero-defect manufacturing process that incorporates calibration, configuration and test systems to improve sensor accuracy and quality. Gems Sensors & Controls CVD pressure transducers deliver exceptionally superior, long-term performance
Advanced sensor manufacturing techniques allow Psibar CVD pressure sensors to deliver superior stability and long-life reliability.
Stainless steel Psibar wafers lie in a gas stream of plasma-enhanced gases. The PECVD process is used because it deposits high quality silicon at low temperature, which does not affect the state of the steel gauge. After deposition, the silicon is ion implanted to modify resistivity.
The thin film is atomically fused directly to the steel surface of the gauge beam and therefore follows the shape of the beam very accurately. This atomic fusion is the foundation for excellent performance and stability.
The CVD strain gauge is affixed to the sensor assembly in a precise, automated laser weld process. A spot weld is made at each end and both side of the beam to assure there is no twisting or tilting of the beam while a stitch weld is applied. Laser welding is fast and cool to prevent any distortion to the strain gauge.